Method for synchronizing particle counters to external events
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United States of America Patent
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Aug 10, 1993
Grant Date -
N/A
app pub date -
Jan 27, 1992
filing date -
Jan 27, 1992
priority date (Note) -
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Abstract
A method and an apparatus for synchronizing particle counts to process events provide a trigger signal related to the process events in lieu of a time-based trigger signal. In one embodiment, the controller to a particle counter further subdivides a process event into sub-intervals to allow profiling of particle counts during the process event. In one embodiment, the controller of the particle counter receives multiple trigger signals corresponding to multiple trigger signal sources, each trigger signal source being identified by a source tag. Particle counts and time-stamps are maintained for each source of the trigger signals.
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