Integrated VLSI radiation/particle detector with biased pin diodes
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United States of America Patent
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Aug 17, 1993
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N/A
app pub date -
Sep 23, 1991
filing date -
Jun 26, 1989
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Abstract
A VLSI radiation/particle detector includes detecting elements based on one or more PIN diodes which are biased for collecting the charge generated by incident radiation or ionizing particles, and readout circuitry integrated on the same chip for detecting the collected charge. The junction of the PIN diode and the well containing the readout circuitry are separated far from each other such that the bias voltage required on the well to direct most generated charge to the collection electrodes can be reduced, and these can be made smaller to improve the detector's spatial resolution.
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