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Abstract

An illuminating optical system comprises parallel light beam generating means for providing a parallel light beam, a first optical integrator for substantially forming a first planar light source by the light beam coming from the parallel light beam generating means, a first condensing optical system for condensing the light beam from the first planar light source, a second optical integrator for substantially forming a second planar light source by the light beam condensed by the first condensing optical system, and a second condensing optical system for illuminating an illuminated plane in overlapping manner by condensing the light beam from the second planar light source formed by the second optical integrator. At least either of the first optical integrator and the first condensing optical system has a variable focal length, and the size of the second planar light source is rendered variable while the size of the illuminated area is maintained constant, through a change in the focal length.

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First Claim