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Abstract

A confocal scanning type of phase contrast microscope comprises a sample supporting member, which supports a sample, and a light source, which produces a light beam. A light projecting optical device forms a light spot of the light beam on the sample. A light receiving optical device forms a point image of the light beam radiated out of the sample. A photodetector detects the point image. A phase difference optical device has a a stop located on the side of the light projecting optical device and a phase plate which is located on the side of the light receiving optical device. The phase difference optical device imparts a phase lag to only either one of a light component, which has been diffracted by the sample, and an undiffracted light component, which has passed through the sample or has been reflected thereby, and causes the light components to interfere with each other. A movable member supports the light projecting optical device, the light receiving optical device, and the phase difference optical device. The movable member is moved such that the light spot scans the sample in main scanning directions The sample supporting member is moved with respect to the movable member in sub-scanning directions, which are normal to the main scanning directions, and at a speed lower than the main scanning speed.

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First Claim