Apparatus for transport and heat treatment of substrates
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United States of America Patent
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-
Sep 14, 1993
Issued Date -
N/A
app pub date -
Jun 11, 1992
filing date -
Jul 31, 1991
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Substrate holders (16) having approximately plate-like, parallelepipedal configuration which can be moved in the vertical position along a given transport path through coating stations. The substrate holder (16) has frame-shaped sides parts (16a, 16b) disposed in parallel planes, in whose window-like openings (25, 26) the substrates (22, 23) are received. Wiping contacts (29, 29a and 30, 30a) are provided on stationary mountings (27, 28) and their resilient ends make contact with the electrically conductive coating (22a, 23a) upon movement through the station, and an electrical circuit can be closed briefly through these wiping contacts (29, 29a and 30, 30a) and the coating (22a, 23a), producing a heating and tempering of the material of the coating.
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