Displacement detecting apparatus using graduated linear scale
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United States of America Patent
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Sep 21, 1993
Grant Date -
N/A
app pub date -
Jun 15, 1992
filing date -
Jun 13, 1991
priority date (Note) -
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Abstract
A displacement detecting apparatus comprises a non-contacting sensor for detecting a displacement of a measured surface, a linear scale unitarily attached to the non-contacting sensor through a coupling member, a graduation read-out device for reading out a graduation of the linear scale, an actuator for moving the non-contacting sensor and the linear scale, and a servo control circuit for driving the actuator, wherein the linear scale and the non-contacting sensor are moved by the actuator in unison with each other. Thus, the displacement of the measured surface can be detected with high accuracy.
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