Concentrator funnel for vacuum line particle monitors
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United States of America Patent
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-
Sep 21, 1993
Grant Date -
N/A
app pub date -
Jan 23, 1992
filing date -
Jan 23, 1992
priority date (Note) -
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status (Latency Note)
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Abstract
A converging funnel is placed in an exhaust line to direct substantially all the gas flow in the exhaust line to the sensing laser beam of a particle sensor, thereby preventing deposition of species carried by the gas from depositing on the particle sensor. By concentrating substantially all gas flow through the laser beam, the particle count rate is increased because substantially all particles carried by the exhaust gas is channeled through the laser beam. Further, the particle sensor is also prevented from adverse heating effects of the exhaust gas. In one embodiment, the converging funnel is mounted to the interior wall of the exhaust line by a centering ring.
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