Micromechanical structure
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United States of America Patent
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Oct 12, 1993
Issued Date -
N/A
app pub date -
Feb 3, 1992
filing date -
Jun 1, 1988
priority date (Note) -
Expired
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Abstract
A micromechanical structure with cavities, containers, openings, canals, depressions, humps or the like for examinations of sample substances for possible changes of physical and/or chemical properties with targeted evaluation and documentation for the purposes of biotechnology, gene technology, cell and immune research and other medical, agricultural and environment research, where the structure consists of semiconducting material (of the group III to V of the elements of the periodic system) or contain the latter or glass or ceramic, diamond, or carbon and is made by a masking technique, especially by a chemical etching technique.
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