Wafer block magazine for a short-time intermediate storage of wafer blocks
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United States of America Patent
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Oct 19, 1993
Grant Date -
N/A
app pub date -
Jul 21, 1992
filing date -
Jul 25, 1991
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A wafer block magazine for a shorttime intermediate storage of wafer blocks is characterized by two or more juxtaposed storage towers, which are provided with vertical conveyors, which inside each storage tower define horizontal storage compartments for the wafer blocks, which storage components are adapted to be vertically raised and lowered. The first storage tower includes a feeding station for receiving the wafer blocks. At least the last storage tower includes a taking station for delivering wafer blocks. The magazine is also characterized by a vertically displaceable horizontal conveyor for forwarding the wafer blocks between horizontally aligned storage compartments of the storage towers.
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