Enhanced vertical thermal reactor system
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United States of America Patent
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Oct 19, 1993
Grant Date -
N/A
app pub date -
Aug 7, 1989
filing date -
Aug 7, 1989
priority date (Note) -
Expired
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Abstract
An enhanced vertical thermal reactor system provides three isolated chambers including a wafer handling chamber, a process chamber including an elevator, and a cool-down chamber, each sealed from the other. The sealing of these individual chambers, each from the other, has the effect of minimizing processing delays associated with the cooling process and the loading and unloading process to thereby improve the productivity of the furnace.
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