Coating method and apparatus
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United States of America Patent
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Oct 19, 1993
Issued Date -
N/A
app pub date -
Apr 10, 1992
filing date -
Jul 6, 1989
priority date (Note) -
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Abstract
Coating method and apparatus. Said coating method comprises setting pressure in a chamber higher than the vapor pressure of a solvent mixed in a liquid which is coated on the surface of a matter to be processed, and dropping and spreading the coating liquid on the surface of the matter while rotating the matter by a predetermined number of rotation.
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