Sensor for a capacitance pressure gauge

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United States of America Patent

PATENT NO 5257542
SERIAL NO

07765557

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A sensor for a capacitance pressure gauge having a diaphragm and a base is formed with a series of thin metallic electrode sections formed on the inside of the diaphragm and base. Electrical connection is made to the base electrode sections through the base and one or two pairs of series connected capacitances are formed with the diaphragm electrodes. No direct electrical connection needs to be made to the diaphragm.

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Patent Owner(s)

Patent OwnerAddress
INFICON GMBHSWISS BA DRAGOS BAAR ZUG

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Voss, Gunter Much, DE 13 167

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