Vaporizer for vacuum coating apparatus
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United States of America Patent
Stats
-
Nov 9, 1993
Grant Date -
N/A
app pub date -
Feb 14, 1992
filing date -
Feb 21, 1991
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A vaporizer is described for use in an apparatus for the coating of substrate under vacuum, the vaporizer comprising a holder and a target plate releasably securable to the holder, with the target plate being acted on at its rear side by a coolant medium which flows through the holder. In order to make rapid interchange of the target plate possible while simultaneously optimizing the cooling, the target plate is fixed to the holder via a clamped connection with intermeshing clamping surfaces.
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