Device for transferring a workpiece into and out from a vacuum chamber
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United States of America Patent
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-
Nov 9, 1993
Issued Date -
N/A
app pub date -
Jun 5, 1992
filing date -
Mar 30, 1989
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A device for transferring a workpiece into and out from a vacuum chamber including a first device for receiving and holding the workpiece in a disk-shaped conveyor within the chamber and a second device for lifting and supporting the first device during the transfer process.
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Cited Art Landscape
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