Apparatus for ion-plasma machining workpiece surfaces including improved decelerating system
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United States of America Patent
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-
Nov 16, 1993
Grant Date -
N/A
app pub date -
May 30, 1991
filing date -
Jun 26, 1990
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Apparatus comprises a vacuum chamber (1) accommodating a source (2) of ion flow directed toward the surface being machined, and a system (3) for decelerating ion flow. The system (3) includes a shielding electrode (5) positioned before the workpieces (4) and having a hole (7) for the passage of ion flow, and at least one decelerating electrode (6) electrically insulated from the walls of the vacuum chamber (1) and shielding electrode (5). The decelerating electrode (6) has the form of a magnetic element whose magnetization vector (M) is substantially congruent with the workpiece surface being machined. In addition, line (13) of electron drift current is closed in a direction transverse of the direction of the ion flow.
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