Thin film capacitor

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 5262920
SERIAL NO

07882000

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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In a thin film capacitor in which a lower electrode,a dielectric film and an upper electrode are formed in order on a substrate, both the lower and upper electrodes are respectively formed with a first conductive layer made of Ti, Ta, Mo and W and a second conductive layer made of Pt, Pd, Rh and Al in this order from the substrate. In addition, a conductive metal oxide film such as made of PdO and others is formed, as required, at least between the lower electrode and the dielectric film or between the upper electrode and the dielectric film.

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Patent Owner(s)

Patent OwnerAddress
NEC CORPORATION A CORP OF JAPAN7-1 SHIBA 5-CHOME MINATO-KU TOKYO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Matsubara, Shogo Tokyo, JP 24 532
Sakuma, Toshiyuki Tokyo, JP 37 363
Yamamichi, Shintaro Tokyo, JP 89 1285

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