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Abstract

A process for fabricating microchannel plates produces large area microchannel plates that have channel exit openings as small as 0.5 micron, MTF .about.1, pitch-limited resolution (a factor of 10 potential improvement in resolution) and at a cost of $0.40/sq. centimeter, and with funneling controlled as to configuration and exit opening size and shape. Microchannels may be rectangular in cross section, or rectangular, or trapezoidal, or other configuration, including straight sided, chevron or balloon sided. Microchannels of differing configurations may be interspersed, for reasons of alignment or to control pixel characteristics. Material choice may include glass, ceramic, metal, alloy and plastics, plus dopants. This materials flexibility, and the improved geometrical uniformity lead to higher signal-to-noise ratio and lower outgassing, and to a significant improvement in performance. Microchannels are formed in `green` glass/ceramic ribbons using high-precision, low-cost and versatile planar process steps, eliminating the need for the fiber-drawing and chemical-etching. The ribbon of green glass/ceramic powder in a binder and solvent slurry is configured in complementary partial microchannel forming grooves and partially dried to a safe handling condition, then carefully stacked upon a takeup device with precise alignment. The stack is cut into segments for final solidification by heat fusing and curing and sliced, then smoothed and equipped with appropriate ion barrier and electrode layers for use as microchannel plates.

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First Claim