Wafer probe station with integrated environment control enclosure
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United States of America Patent
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Nov 30, 1993
Grant Date -
N/A
app pub date -
May 29, 1992
filing date -
May 29, 1992
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A wafer probe station is equipped with a compact, integrated controlled-environment enclosure providing EMI shielding, substantially hermetic sealing for a dry purge gas for low-temperature testing, and a dark environment. The sealing isolation of the wafer chuck and test probe provided by the enclosure is maintained despite the fact that the probe and chuck positioning mechanisms extend partially outside the enclosure, with positioning members extending movably between the interior and exterior of the enclosure. Sealing is maintained by movable sealing members at the locations where the positioning members penetrate the enclosure.
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