Process for forming anti-reflective coatings comprising light metal fluorides
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United States of America Patent
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Dec 7, 1993
Grant Date -
N/A
app pub date -
May 30, 1988
filing date -
May 30, 1988
priority date (Note) -
Expired
status (Latency Note)
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Abstract
This invention is directed to a process for forming coatings comprising light metal fluorides on a substrate. More particularly, the coating comprising light metal fluorides is preferably made using sol-gel techniques and may comprise a concentration gradient of the light metal fluorides across the thickness of the coating to provide it with unique anti-reflective properties.
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