Diamond and its preparation by chemical vapor deposition method

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United States of America Patent

PATENT NO 5270028
SERIAL NO

07884891

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Abstract

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A diamond having improved properties is produced by a method which comprises introducing a mixture of hydrogen (A), an inert gas (B) and a carbon-containing compound (C) in molar ratios which satisfy the following equations: ##EQU1## generating a low temperature plasma with one of direct current and an alternating current electromagnetic field under pressure of 5 to 760 Torr to form the diamond on a substrate, wherein there is no substantial differnce between a place where the plasma is generated and a place where the diamond is formed on the substrate.

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Patent Owner(s)

Patent OwnerAddress
SUMITOMO ELECTRIC INDUSTRIES LTDOSAKA JAPAN OSAKA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fujimori, Naoji Itami, JP 116 2595
Imai, Takahiro Itami, JP 179 2278
Tanabe, Keiichiro Itami, JP 36 549

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