Valve equipped with a position detector and a micropump incorporating said valve
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United States of America Patent
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-
Dec 21, 1993
Grant Date -
N/A
app pub date -
Apr 21, 1992
filing date -
Aug 31, 1990
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A valve is formed from a silicon wafer (20) and has a position detector to detect by contact the position of the valve and hence reveal any malfunction. The position detector comprises a first electrical contact (54) formed on a glass support (32) mounted on the back face of the wafer (20), a second electrical contact fixed to the wafer (20) and an electrical impedance measurement circuit (resistance or capacitance according to the embodiment) between the two electrical contacts. The valve is useful in a micropump for the injection of medicaments.
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