Liquid supply apparatus
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United States of America Patent
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-
Jan 4, 1994
Grant Date -
N/A
app pub date -
Dec 10, 1992
filing date -
Dec 13, 1991
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A developer-supply apparatus has a developer-liquid supply nozzle, a spin chuck for supporting a wafer, and a holder for allowing the supply nozzle to wait there. The supply nozzle is transferred between a position above the chuck and a waiting position on the holder. The supply nozzle has a nozzle tip with a plurality of through holes communicating with a space containing a developer liquid. A U-shaped conduit extending along the line of the through holes is provided in the holder, for removing drops of the developer liquid hanging from the nozzle tip. The conduit has a bottom provided with a plurality of through holes for exhausting the developer liquid.
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