Process for producing a magnetic disk having a metal containing hard carbon coating by plasma chemical vapor deposition under a negative self bias

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United States of America Patent

PATENT NO 5275850
SERIAL NO

07755589

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Abstract

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A magnetic disk comprising a nonmagnetic substrate, a metallic thin film magnetic layer provided on the substrate and a hard carbon protective layer provided on the magnetic layer, the hard carbon protective layer containing at least one metal element of silicon, germanium, tin and lead, or further containing fluorine, formed by bias plasma CVD treatment, has a high attrition resistance, a high peeling resistance and a high crack resistance or further a higher corrosion resistance.

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Patent Owner(s)

Patent OwnerAddress
HITACHI LTD6-6 MARUNOUCHI 1-CHOME CHIYODA-KU TOKYO 1008280 ?1008280

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Itoh, Makiko Yokohama, JP 1 47
Kitoh, Makoto Yokohama, JP 13 196
Kokaku, Yuichi Yokohama, JP 10 191

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