Wafer probing test machine

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 5278494
SERIAL NO

07836870

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A wafer probing test machine including a loading/unloading section defined by a first frame to enclose plurality of cassette stages therein, a test section defined by a second frame for enclosing a test stage therein, an elevator for moving at least one of the cassette stages up and down, and a wafer transfer system having a multi-jointed arm for taking out the wafer from a cassette and transferring the wafer onto the test stage.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
TOKYO ELECTRON LIMITED3-1 AKASAKA 5-CHOME MINATO-KU TOKYO 1076325 ?1076325

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Obigane, Tadashi Kofu, JP 1 537

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation