Semiconductor processing system with robotic autoloader and load lock

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United States of America Patent

PATENT NO 5280983
SERIAL NO

07963006

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A wafer processing system includes an autoloader mounted within a load lock for providing batch, cassette-to-cassette automatic wafer transfer between the semiconductor processing chamber and cassette load and unload positions within the load lock. The system provides rapid, contamination-free loading and unloading of semiconductor wafers.

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Patent Owner(s)

  • APPLIED MATERIALS, INC.

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Abolnikov, Edward M San Francisco, CA 3 218
Catlin, Jr Richard M Foster City, CA 3 218
Cheng, David San Jose, CA 70 5148
Lowrance, Robert B Santa Clara, CA 96 2212
Maydan, Dan Los Altos Hills, CA 119 12725
Moran, J Christopher Mountain View, CA 4 245
Reinke, Lance S San Jose, CA 4 219
Ridgeway, Gregory W San Jose, CA 3 218
Ryan-Harris, Charles La Honda, CA 3 218
Seilheimer, Richard A Pleasanton, CA 4 257
Somekh, Sasson R Redwood City, CA 15 629

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