Structure and method of making Alpha-Ta in thin films
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jan 25, 1994
Issued Date -
N/A
app pub date -
Jan 15, 1993
filing date -
Oct 26, 1990
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The present invention relates generally to a structure and a method of making Alpha-Ta films, and more particularly, to a structure and a method of making Alpha-Ta in thin films. A seed layer of Ta reactively sputtered in a nitrogen containing environment is grown on the substrate, and using this seed layer of Ta(N) layers of Alpha-Ta are then formed.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully