Thin film planarization process for fabricating magnetic heads employing a stitched pole structure

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United States of America Patent

PATENT NO 5282308
SERIAL NO

07998173

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Abstract

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A method for fabricating a thin film magnetic head assembly including the procedure of hardening a portion of the upper pole-tip photoresist mask to create a planarizing stitching pedestal in the region where the upper pole-tip overlaps with the upper pole-yoke. The upper pole assembly is deposited in two steps to create a stitched pole consisting of an upper pole-tip joined to an upper pole-yoke element at the stitching pedestal. The method reduces process complexity by eliminating masking steps and also eliminates the usual close alignment requirements for upper insulation and pole-yoke deposition procedures, thereby improving process yield.

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Patent Owner(s)

Patent OwnerAddress
HGST NETHERLANDS B VHERIKERBERGWEG 238 LUNA ARENA AMSTERDAM 1101 CM

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Mao-Min San Jose, CA 106 2006
Ju, Kochan San Jose, CA 143 2213
Lee, Rodney E Prunedale, CA 4 78
Tsang, Ching Sunnyvale, CA 2 34

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