US Patent No: 5,285,097

Number of patents in Portfolio can not be more than 2000

Semiconductor sensor of electrostatic capacitance type

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Abstract

A semiconductor sensor has a semiconductor substrate including both of a conductive or semiconductor surface and an insulative surface and a pair of conductive members provided on said conductive or semiconductor surface of the substrate. There is constructed a sensor section in which at least one of the pair of conductive members can be deformed and an electrostatic capacitance between the pair of conductive members is variable. The semiconductor substrate has a functional element which is electrically connected to the sensor section.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
CANON KABUSHIKI KAISHATOKYO49710

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hirai, Yutaka Hikone, JP 83 1555

Cited Art

Patent Info (Count) # Cites Year
 
VAISALA OY (2)
4,628,403 Capacitive detector for absolute pressure 32 1985
4,875,134 Pressure sensor construction and method for its fabrication 14 1989
 
ALLIED SIGNAL (1)
5,048,343 Temperature-compensated strain-gauge amplifier 9 1990
 
HOKUSHIN ELECTRIC WORKS, LTD. (1)
4,357,834 Displacement converter 23 1980
 
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (1)
5,012,304 Semiconductor devices having strain-induced lateral confinement of charge carriers 14 1989

Patent Citation Ranking

Forward Cites

Patent Info (Count) # Cites Year
 
PRECISION MECHATRONICS PTY LTD (30)
7,234,357 Wafer bonded pressure sensor 0 2004
7,159,467 Pressure sensor with conductive ceramic membrane 4 2004
7,143,652 Pressure sensor for high acceleration environment 5 2004
7,124,643 Pressure sensor with non-planar membrane 7 2004
7,093,494 Micro-electromechanical pressure sensor 5 2004
7,089,797 Temperature insensitive pressure sensor 3 2004
7,089,798 Pressure sensor with thin membrane 11 2004
7,260,995 Pressure sensor having thin pressure sensing membrane 0 2006
7,171,855 Sensor for sensing temperature adjusted fluid pressure 4 2006
7,165,460 Temperature compensated pressure sensor 4 2006
7,260,993 Pressure sensor with low sensitivity to acceleration forces 0 2006
7,258,019 Pressure sensor for high acceleration environments 0 2006
7,258,020 Pressure sensor with conductive ceramic membrane 1 2006
7,367,235 Thermal expansion compensated pressure sensor 0 2006
7,334,480 Dual membrane sensor for temperature compensated pressure sensing 5 2006
7,380,460 Dual wafer pressure sensor 0 2007
7,770,441 Acceleration insensitive pressure sensor 0 2007
7,458,272 Capacitative pressure sensor with ceramic membrane 0 2007
7,644,621 Capped and chambered pressure sensor 0 2007
7,568,395 Pressure sensor with dual chambers 1 2007
7,516,669 Capacitance sensing circuit for a pressure sensor 1 2008
7,464,598 Method of pressure sensing with a pressure sensor having a sensor membrane and a compensation membrane 3 2008
7,464,599 Temperature compensating pressure sensor having active and reference membranes 6 2008
7,617,734 Pressure sensor with dual chamber cover 0 2008
7,913,567 Temperature compensating pressure sensor having corrugated active membrane 0 2008
7,581,447 Temperature compensating pressure sensing arrangement 5 2008
7,854,170 Capacitance sensing circuit for membrane pressure sensor 0 2009
7,841,238 Pressure sensor with temperature compensation 0 2009
7,921,725 Pressure sensor with dual chamber cover and corrugated membrane 0 2009
7,934,427 Capacitative pressure sensor 0 2009
 
ROSEMOUNT AEROSPACE INC. (6)
7,628,309 Transient liquid phase eutectic bonding 2 2005
7,400,042 Substrate with adhesive bonding metallization with diffusion barrier 6 2005
7,538,401 Transducer for use in harsh environments 14 2006
7,642,115 Method for making a transducer 2 2009
7,952,154 High temperature resistant solid state pressure sensor 2 2009
8,013,405 Transducer with fluidly isolated connection 0 2009
 
HITACHI, LTD. (5)
6,305,223 Acceleration sensor 5 1997
6,566,742 Structure for mounting components 3 2000
6,388,887 Surface mount type package unit 4 2000
6,463,804 Acceleration sensor 3 2001
6,561,030 Acceleration sensor 1 2001
 
NIPPONDENSO CO., LTD. (4)
5,549,785 Method of producing a semiconductor dynamic sensor 14 1993
5,500,549 Semiconductor yaw rate sensor 25 1994
5,541,437 Acceleration sensor using MIS-like transistors 25 1995
6,137,150 Semiconductor physical-quantity sensor having a locos oxide film, for sensing a physical quantity such as acceleration, yaw rate, or the like 24 1995
 
MURATA MANUFACTURING CO., LTD. (3)
5,481,915 Acceleration sensor with direct mounting 3 1993
5,561,248 Acceleration sensor 28 1994
5,892,154 Acceleration detection device 2 1997
 
APPLIED MATERIALS, INC. (1)
6,887,732 Microstructure devices, methods of forming a microstructure device and a method of forming a MEMS device 7 2001
 
GE NOVASENSOR INC. (1)
6,316,796 Single crystal silicon sensor with high aspect ratio and curvilinear structures 15 1996
 
KABUSHIKI KAISHA TOKAI RIKA DENKI SEISAKUSHO (1)
5,456,117 Pressure sensor apparatus and method of manufacturing wherein the silicon-crystal substrate of the sensor has inclined crystallographic axes and gage resistors formed in a cavity of the substrate 2 1994
 
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (1)
5,755,888 Method and apparatus of forming thin films 11 1995
 
NOVASENSOR, LUCAS (1)
6,084,257 Single crystal silicon sensor with high aspect ratio and curvilinear structures 20 1995
 
TEXAS INSTRUMENTS INCORPORATED (1)
5,792,954 Condition responsive sensor 3 1996