Semiconductor sensor of electrostatic capacitance type
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United States of America Patent
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Feb 8, 1994
Grant Date -
N/A
app pub date -
Feb 21, 1992
filing date -
Feb 25, 1991
priority date (Note) -
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Abstract
A semiconductor sensor has a semiconductor substrate including both of a conductive or semiconductor surface and an insulative surface and a pair of conductive members provided on said conductive or semiconductor surface of the substrate. There is constructed a sensor section in which at least one of the pair of conductive members can be deformed and an electrostatic capacitance between the pair of conductive members is variable. The semiconductor substrate has a functional element which is electrically connected to the sensor section.
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