Process for plasma deposition of a carbon rich coating
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United States of America Patent
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Feb 15, 1994
Issued Date -
N/A
app pub date -
Mar 31, 1993
filing date -
Dec 23, 1991
priority date (Note) -
Expired
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Abstract
The present invention provides a magnetic recording medium that includes a polymeric flexible substrate and a magnetic layer coating thereon, with a binderless carbon rich layer adhered to the magnetic layer. The present invention also provides a process for the plasma deposition of the carbon rich coating onto a magnetic medium comprising the steps of: a. providing a magnetic medium in a vacuum chamber; b. generating carbon rich plasma in the vacuum chamber by injecting a plasma gas suitable to provide a carbon rich coating into an elongated hollow cathode; and providing a sufficient voltage to create and maintain plasma; and maintaining a vacuum in the vacuum chamber sufficient for the plasma; and c. exposing the magnetic medium to the plasma while the magnetic medium is influenced by a radio frequency bias electrode to accelerate the plasma towards the magnetic medium and deposit the carbon rich coating on the magnetic medium.
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