Surface cleaning using an argon or nitrogen aerosol

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United States of America Patent

PATENT NO 5294261
SERIAL NO

07970346

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Abstract

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A method is disclosed for cleaning microelectronic surfaces using an aerosol of at least substantially solid argon or nitrogen particles which impinge upon the surface to be cleaned and then evaporate and the resulting gas is removed by venting along with the contaminants dislodged by the cleaning method.

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Patent Owner(s)

Patent OwnerAddress
VERSUM MATERIALS US LLC8555 SOUTH RIVER PARKWAY TEMPE AS 85284

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cooper, Douglas W Milwood, NY 12 706
McDermott, Wayne T Allentown, PA 6 653
Ockovic, Richard C Northampton, PA 5 652
Schwarz, Alexander Bethlehem, PA 166 4321
Wolfe, Henry L Pleasant Valley, NY 3 429
Wu, Jin J Ossining, NY 10 784

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