Gas measuring device and processing apparatus provided with the gas measuring device

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United States of America Patent

PATENT NO 5294280
SERIAL NO

07904556

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A gas measuring device includes a dissolving unit for dissolving gas to be measured in solvent medium, a measuring unit for measuring the amount of ions generated when the gas to be measured is ionized in the liquid medium, and a calculating unit for calculating the amount of the gas to be measured from a value measured by the measuring unit.

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Patent Owner(s)

Patent OwnerAddress
TOKYO ELECTRON LIMITED3-1 AKASAKA 5-CHOME MINATO-KU TOKYO 1076325 ?1076325
EBARA RESEARCH CO LTD4-2-1 HONFUJISAWA FUJISAWA-SHI KANAGAWA-KEN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Arimitsu, Hidenobu Kanagawa, JP 4 23
Matsuo, Takenobu Tokyo, JP 23 302
Moriya, Shuji Tokyo, JP 47 534
Wakabayashi, Tsuyoshi Tokyo, JP 10 508

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