Illuminating apparatus and projection exposure apparatus provided with such an illuminating apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Mar 22, 1994
Grant Date -
N/A
app pub date -
Jan 22, 1993
filing date -
Feb 1, 1992
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An illuminating apparatus comprises a first optical integrator and a second optical integrator which are replaceably arranged. The second optical integrator is structured to provide substantially the same number of secondary light sources as the first optical integrator but with the different size of surface light source formed by these second light sources. Further, the structure is arranged so that it has an aperture number on the emission side, which is equal to the aperture number of the first optical integrator on its emission side. Hence, the illuminance evenness is not degraded even when the .sigma. value is significantly varied.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully