Method of fabricating an isolated pixel photoconductive structure
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United States of America Patent
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Mar 29, 1994
Issued Date -
N/A
app pub date -
Oct 17, 1991
filing date -
Oct 13, 1989
priority date (Note) -
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Abstract
A photoconductive substrate is provided to voltage modulate a liquid crystal layer in response to input light. The substrate is partitioned into electrically isolated pixels to eliminate lateral spread of charge carriers therein, and increase the dynamic range of the liquid crystal light valve while preserving resolution. The substrate is partitioned by forming an interconnecting network of deep trenches in a surface thereof, and filling the trenches with an insulating material such as silicon dioxide. The opposite surface of the substrate is etched away to expose the silicon dioxide in the trenches, thereby providing the substrate with partitions which extend completely therethrough between the opposite surfaces.
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