Ion-beam deposited multilayer waveguides and resonators

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United States of America Patent

PATENT NO 5303319
SERIAL NO

07997994

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Abstract

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An optical waveguide is formed by depositing multiple layers of thin films using the process of ion beam sputter deposition. The waveguide is made up of alternating layers of a first material and a second material wherein the two materials have differing indices of refraction and low optical loss. These materials are deposited upon a thermally stable substrate creating a multilayer stack which functions as a waveguide. The multilayer waveguide has ultra low propagation losses and good mode discrimination, thus being very efficient for use in single mode applications. The waveguide is easily adaptable to batch processing which reduces costs and increases the performance of the waveguide.

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Patent Owner(s)

Patent OwnerAddress
UNIVERSITY OF ROCHESTOR518 HYLAN BUILDING P O BOX 2245 MORRISTOWN NJ 14627-0140

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ford, Carol M Columbia Heights, MN 19 345
Podgorski, Theodore J St. Paul, MN 18 197
Ramberg, Randy J Roseville, MN 10 213
Sullivan, Charles T Burnsville, MN 13 543

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