Edge detector
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United States of America Patent
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Apr 19, 1994
Issued Date -
N/A
app pub date -
Nov 20, 1992
filing date -
Mar 29, 1989
priority date (Note) -
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Abstract
An edge detector is disclosed, which detector is improved by providing a probe moving relatively with a tested pattern, a device for detecting a working force or a tunnel current generated between the probe and the tested pattern, and a device for detecting an edge of the tested pattern according to the detected working force or tunnel current. An edge of the tested pattern is detected at high resolution by detecting the tunnel current flowing between a conductive tested pattern and a probe kept closely opposite thereto, or by detecting an atomic force or a magnetic force working between an insulated or a magnetic tested pattern and a lever.
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