Digital flexure beam accelerometer
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United States of America Patent
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-
Apr 26, 1994
Issued Date -
N/A
app pub date -
May 1, 1992
filing date -
Oct 12, 1990
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
Acceleration is measured using an array of micro-machined elements. The array is configured so each successive element is deflected by a higher acceleration. For each acceleration there will be a set of elements that is deflected. By determining the transition point between deflected and undeflected elements, the acceleration can be measured.
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