Corrosion-resistant member for chemical apparatus using halogen series corrosive gas
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United States of America Patent
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Apr 26, 1994
Grant Date -
N/A
app pub date -
Mar 26, 1992
filing date -
Mar 26, 1991
priority date (Note) -
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Abstract
An excellent corrosion resistant member of a ceramic heater for semiconductor production apparatuses to be exposed to a halogen series corrosive gas is provided. The corrosion resistant member uses one of an aluminum nitride and alumina sintered body as a substrate. A ceramic heater using the corrosion resistive member is also disclosed as well as a semiconductor heating device using the ceramic heater.
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