Illuminating optical apparatus

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United States of America Patent

PATENT NO 5307207
SERIAL NO

07780850

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Abstract

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An illuminating optical apparatus comprises a stable resonator type laser equipped with a wavelength selecting element and a device for vibrating the beam one-dimensionally in a direction crossing the longer direction of the beam cross section at at least one of the entrance side and exit side of a fly's eye lens or optical integrator.

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Patent Owner(s)

Patent OwnerAddress
NIKON CORPORATIONTOKYO 140-8601

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ichihara, Yutaka Yokohama, JP 46 1570

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