Interface apparatus for transporting substrates between substrate processing apparatus
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United States of America Patent
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May 3, 1994
Issued Date -
N/A
app pub date -
Jun 22, 1993
filing date -
Jul 23, 1990
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An interface apparatus for transferring substrates between processing apparatus which provide various treatments for the substrates. The interface apparatus includes a transfer mechanism which, during a normal operation, receives substrates from an upstream processing apparatus and delivers the substrates to a downstream processing apparatus. Upon occurrence of a trouble in the downstream processing apparatus, the substrates transported from the upstream processing apparatus to the transfer mechanism are deposited in a substrate storage by a depositing and fetching mechanism. After the trouble is eliminated, the transfer mechanism delivers the substrates taken out of the storage to the downstream processing apparatus.
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