Profilometer stylus assembly insensitive to vibration
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United States of America Patent
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May 10, 1994
Grant Date -
N/A
app pub date -
Oct 2, 1992
filing date -
Oct 2, 1992
priority date (Note) -
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status (Latency Note)
Importance
Abstract
A stylus profilometer having a counterbalanced stylus with a motion transducer using a vane moving between parallel, spaced-apart, conductive plates which damp the motion of the vane by means of trapped air. The vane forms an electrode with the plates so that the combination is a pair of capacitors in a balanced bridge arrangement. Motion of the stylus causes an unbalance of the bridge indicative of the extent of stylus motion. A lever arm associated with the stylus has a tip influenced by a magnetic field which biases the stylus or controls force on a surface to be measured. The entire assembly has a very low moment of inertia to reduce the effects of vibration on the stylus and thereby increase resolution of the device and reduce damage to the substrate.
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