Integrated monolithic gyroscopes/accelerometers with logic circuits

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United States of America Patent

PATENT NO 5313835
SERIAL NO

07810045

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Abstract

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A multi-axes gyroscope, a single axis gyroscope and a three axis accelerometer are formed on a single semiconductor substrate, along with and MPU. The gyroscopes provide sensing for rotation about three mutually orthogonal axes and the accelerometer provides sensing of acceleration along the three axes. The MPU controls and drives the gyroscopes and accelerometer and provides a continuous indication of position.

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Patent Owner(s)

Patent OwnerAddress
FREESCALE SEMICONDUCTOR INC6501 WILLIAM CANNON DRIVE WEST AUSTIN TX 78735

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dunn, William C Mesa, AZ 20 1019

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