Touch sensor unit of prober for testing electric circuit and electric circuit testing apparatus using the touch sensor unit
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United States of America Patent
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May 24, 1994
Grant Date -
N/A
app pub date -
Aug 6, 1991
filing date -
Aug 6, 1990
priority date (Note) -
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Abstract
A touch sensing unit has an ac signal generator for supplying an ac signal to a semiconductor chip of a semiconductor wafer or a test probe needle, and a touch sensor for sensing formation of an ac signal loop passing an ac signal of the signal generator when the test probe needle and the IC chip are touched with each other by being relatively approached to each other.
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