Method of fabricating a thin-film transistor and wiring matrix device

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United States of America Patent

PATENT NO 5320973
SERIAL NO

08002130

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method for easily fabricating a thin-film transistor device which has a high reliability. A thin-film transistor is formed on a substrate, the transistor including a first conducting layer deposited on the substrate, a gate insulating layer formed on the first conducting layer, a semiconductor layer deposited on the gate insulating layer, and source and drain electrodes on the semiconductor layer. A multi-layer wiring section is provided adjacent the thin-film transistor, including a first conducting wiring layer formed on the substrate, wiring insulating layer formed on the first conducting wiring layer, and a second conducting wiring layer deposited on the wiring insulating layer and contacting the first conducting wiring layer as well as a portion of the thin-film transistor. The gate insulating layer and the wiring insulating layer are made of the same inorganic material and are of the same thickness.

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Patent Owner(s)

Patent OwnerAddress
FUJI XEROX CO LTDTOKYO JAPAN TOKYO METROPOLIS

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kobayashi, Kenichi Kanagawa, JP 337 4604

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