Probe apparatus for probing an object held above the probe card

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United States of America Patent

PATENT NO 5321453
SERIAL NO

07923539

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Abstract

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A probe apparatus having a probe card having plurality of probes, a member arranged above the probe card to hold an object to be probed, and a test head electrically connected to the probes of the probe card.

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Patent Owner(s)

Patent OwnerAddress
TOKYO ELECTRON LIMITED3-1 AKASAKA 5-CHOME MINATO-KU TOKYO 107-6325 107-6325

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Karasawa, Wataru Yokohama, JP 17 553
Mori, Shigeoki Ayase, JP 5 257

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