Micromechanical actuator
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United States of America Patent
Stats
-
Jun 21, 1994
Grant Date -
N/A
app pub date -
Dec 11, 1990
filing date -
Apr 28, 1989
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A micromechanical actuator is suggested, the movable part of which, such as the diaphragm, the bending bar or a similar device, can be moved relative to a stationary part by a combination of electromagnetic and electrostatic forces. The manufacturing techniques and the applications of the actuator are described. The construction is very compact, that is, highly integrated.
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Cited Art Landscape
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