Bridge for connecting cores in a manufacturing equipment of polycrystal silicon
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United States of America Patent
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Jul 5, 1994
Grant Date -
N/A
app pub date -
Apr 27, 1992
filing date -
Nov 4, 1989
priority date (Note) -
Expired
status (Latency Note)
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Abstract
In a equipment for manufacturing polycrystal silicon by depositing it on filament cores electrically heated, by means of thermal decomposition of monosilane gas, a bridge for connecting said filament cores is constituted by tantalum, molybdenum, tungsten or zirconium. Preferably the sectional shape of the connection bridge may be of upturned triangle, tear droplet or rectangle.
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