Low reset voltage process for DMD
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United States of America Patent
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Jul 19, 1994
Issued Date -
N/A
app pub date -
Jan 16, 1992
filing date -
Nov 13, 1990
priority date (Note) -
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Abstract
It is possible to use an oriented monolayer to limit the Van der Waals forces between two elements by passivation. An oriented monolayer (34) is formed upon the landing electrode (10) of a spatial light modulator element. When the element is activated and deflects to come in contact with the landing electrode, the oriented monolayer decreases the Van der Waals forces and prevents the element from sticking to the electrode.
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