Microminiaturized pump
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United States of America Patent
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-
Aug 9, 1994
Grant Date -
N/A
app pub date -
Oct 20, 1992
filing date -
Feb 27, 1990
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A microminiaturized pump consists of two superposed, interconnected pump bodies of semiconductor material, which each include electrically conductive regions insulated from one another. At least one of the two pump bodies has a thin, flexible diaphragm having integrated therein at least one check valve, which has an inlet aperture and a cover plate over it, the thin, flexible diaphragm including at least part of the electrically conductive region of one pump body, whereas, in relation to the surface dimensions of the thin, flexible diaphragm, the electrically conductive region of the other pump body is arranged at a short distance from the thin, flexible diaphragm.
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