Two component straightness interferometer apparatus for measuring movements of parts of a machine
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United States of America Patent
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-
Aug 9, 1994
Grant Date -
N/A
app pub date -
Feb 3, 1993
filing date -
Feb 8, 1992
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A straightness interferometer system for determining the straightness of the relative movement of two machine parts is disclosed in which the required optical elements are combined into two optical components. In particular one optical component consists of a cold light source, a straightness reflector and a detector all combined together, and linked to a remote laser by a fibre optical cable. The other optical component is a beam diverging prism, e.g. a Wollaston prism together with a retroreflector. The advantage, particularly in a moving bed machine, is that the Wollaston prism can be mounted on the fixed spindle, and the light source, straightness reflector and detector are all mounted on the machine bed without the risk of errors occurring due to tilting movements of the bed as it moves.
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