US Patent No: 5,348,619

Number of patents in Portfolio can not be more than 2000

Metal selective polymer removal

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Abstract

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A metal selective polymer removal process is disclosed which prevents metal lift-off for use especially suited for ULSI fabrication.

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First Claim

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all claims..

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Patent Owner(s)

Patent OwnerAddressTotal Patents
TEL FSI, INC.CHASKA, MN43
TEXAS INSTRUMENTS INCORPORATEDDALLAS, TX18253

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bohannon, Brynne K Sachse, TX 3 130
Syverson, Daniel J Chaska, MN 6 460

Cited Art Landscape

Patent Info (Count) # Cites Year
 
TEXAS INSTRUMENTS INCORPORATED (2)
4,566,935 Spatial light modulator and method 511 1984
4,749,440 Gaseous process and apparatus for removing films from substrates 248 1987
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (1)
5,055,383 Process for making masks with structures in the submicron range 18 1989
 
KABUSHIKI KAISHA TOSHIBA (1)
5,030,319 Method of oxide etching with condensed plasma reaction product 101 1989
 
MICRON TECHNOLOGY, INC. (1)
5,089,084 Hydrofluoric acid etcher and cascade rinser 49 1990
 
NORTHROP GRUMMAN CORPORATION (1)
4,711,017 Formation of buried diffusion devices 32 1986
 
SHARP KABUSHIKI KAISHA (1)
5,200,361 Process for preparing a semiconductor device using hydrogen fluoride and nitrogen to remove deposits 13 1991
 
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (1)
5,201,992 Method for making tapered microminiature silicon structures 79 1991
 
WACKER SILTRONIC GESELLSCHAFT FUR HALBLEITERMATERIALIEN AKTIENGESELLSCHAFT (1)
5,181,985 Process for the wet-chemical surface treatment of semiconductor wafers 92 1991

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
SILICON LIGHT MACHINES CORPORATION (47)
5,841,579 Flat diffraction grating light valve 182 1995
5,808,797 Method and apparatus for modulating a light beam 324 1996
5,982,553 Display device incorporating one-dimensional grating light-valve array 359 1997
6,088,102 Display apparatus including grating light-valve array and interferometric optical system 132 1997
6,271,808 Stereo head mounted display using a single display device 63 1998
6,130,770 Electron gun activated grating light valve 73 1998
6,101,036 Embossed diffraction grating alone and in combination with changeable image display 69 1998
6,215,579 Method and apparatus for modulating an incident light beam for forming a two-dimensional image 112 1998
6,956,878 Method and apparatus for reducing laser speckle using polarization averaging 31 2000
7,177,081 High contrast grating light valve type device 18 2001
6,764,875 Method of and apparatus for sealing an hermetic lid to a semiconductor die 28 2001
6,865,346 Fiber optic transceiver 4 2001
6,747,781 Method, apparatus, and diffuser for reducing laser speckle 65 2001
6,829,092 Blazed grating light valve 13 2001
6,707,591 Angled illumination for a single order light modulator based projection system 4 2001
6,800,238 Method for domain patterning in low coercive field ferroelectrics 1 2002
6,782,205 Method and apparatus for dynamic equalization in wavelength division multiplexing 64 2002
6,991,953 Microelectronic mechanical system and methods 10 2002
6,767,751 Integrated driver process flow 5 2002
6,728,023 Optical device arrays with optimized image resolution 24 2002
7,054,515 Diffractive light modulator-based dynamic equalizer with integrated spectral monitor 1 2002
6,822,797 Light modulator structure for producing high-contrast operation using zero-order light 6 2002
6,872,984 Method of sealing a hermetic lid to a semiconductor die at an angle 25 2002
6,829,258 Rapidly tunable external cavity laser 30 2002
6,908,201 Micro-support structures 4 2002
6,813,059 Reduced formation of asperities in contact micro-structures 76 2002
6,714,337 Method and device for modulating a light beam and having an improved gamma response 8 2002
7,057,795 Micro-structures with individually addressable ribbon pairs 2 2002
6,801,354 2-D diffraction grating for substantially eliminating polarization dependent losses 10 2002
6,956,995 Optical communication arrangement 4 2002
6,712,480 Controlled curvature of stressed micro-structures 7 2002
7,049,164 Microelectronic mechanical system and methods 55 2002
6,928,207 Apparatus for selectively blocking WDM channels 2 2002
7,057,819 High contrast tilting ribbon blazed grating 4 2002
6,987,600 Arbitrary phase profile for better equalization in dynamic gain equalizer 1 2002
6,934,070 Chirped optical MEM device 4 2002
6,927,891 Tilt-able grating plane for improved crosstalk in 1×N blaze switches 3 2002
7,068,372 MEMS interferometer-based reconfigurable optical add-and-drop multiplexor 5 2003
7,286,764 Reconfigurable modulator-based optical add-and-drop multiplexer 3 2003
6,947,613 Wavelength selective switch and equalizer 1 2003
6,922,272 Method and apparatus for leveling thermal stress variations in multi-layer MEMS devices 7 2003
7,391,973 Two-stage gain equalizer 1 2003
7,027,202 Silicon substrate as a light modulator sacrificial layer 55 2003
6,922,273 PDL mitigation structure for diffractive MEMS and gratings 2 2003
6,829,077 Diffractive light modulator with dynamically rotatable diffraction plane 3 2003
6,806,997 Patterned diffractive light modulator ribbon for PDL reduction 2 2003
7,042,611 Pre-deflected bias ribbons 0 2003
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (7)
5,780,363 Etching composition and use thereof 19 1997
5,965,465 Etching of silicon nitride 10 1997
6,150,282 Selective removal of etching residues 11 1997
6,033,996 Process for removing etching residues, etching mask and silicon nitride and/or silicon dioxide 18 1997
6,200,891 Removal of dielectric oxides 16 1998
6,117,796 Removal of silicon oxide 4 1998
6,066,267 Etching of silicon nitride 9 1999
 
APPLIED MATERIALS, INC. (6)
6,010,603 Patterned copper etch for micron and submicron features, using enhanced physical bombardment 21 1997
6,008,140 Copper etch using HCI and HBr chemistry 26 1997
6,489,247 Copper etch using HCl and HBR chemistry 5 1999
6,488,862 Etched patterned copper features free from etch process residue 11 1999
6,534,416 Control of patterned etching in semiconductor features 4 2000
6,692,903 Substrate cleaning apparatus and method 17 2000
 
TEXAS INSTRUMENTS INCORPORATED (3)
5,650,881 Support post architecture for micromechanical devices 264 1994
6,447,126 Support post architecture for micromechanical devices 330 1995
5,631,782 Support post architecture for micromechanical devices 79 1995
 
MASSACHUSETTS INSTITUTE OF TECHNOLOGY (2)
6,107,166 Vapor phase cleaning of alkali and alkaline earth metals 2 1997
6,740,247 HF vapor phase wafer cleaning and oxide etching 35 2000
 
NXP B.V. (2)
5,851,302 Method for dry etching sidewall polymer 15 1997
5,925,577 Method for forming via contact hole in a semiconductor device 24 1997
 
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (2)
5,755,891 Method for post-etching of metal patterns 3 1997
5,858,879 Method for etching metal lines with enhanced profile control 64 1997
 
FREESCALE SEMICONDUCTOR, INC. (1)
5,693,147 Method for cleaning a process chamber 26 1995
 
MICRON TECHNOLOGY, INC. (1)
5,882,535 Method for forming a hole in a semiconductor device 29 1997
 
PROMOS TECHNOLOGIES INC. (1)
6,399,509 Defects reduction for a metal etcher 1 2000
 
SANDIA CORPORATION (1)
6,930,051 Method to fabricate multi-level silicon-based microstructures via use of an etching delay layer 3 2002
 
WINBOND ELECTRONICS CORP. (1)
6,329,293 Method for cleaning a polymer 1 1998