Metal selective polymer removal

United States of America Patent

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Sep 20, 1994
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app pub date
Sep 3, 1992
filing date
Sep 3, 1992

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Abstract

A metal selective polymer removal process is disclosed which prevents metal lift-off for use especially suited for ULSI fabrication.

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Patent Owner(s)

Patent Owner	Address
TEL FSI INC	3455 LYMAN BOULEVARD CHASKA MN 55318

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H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

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Inventor Name	Address	# of filed Patents	Total Citations
Bohannon, Brynne K	Sachse, TX	3	133
Syverson, Daniel J	Chaska, MN	6	483

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Metal selective polymer removal

Number of patents in Portfolio can not be more than 2000

United States of America Patent

07940101

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PATENT NO	5348619
SERIAL NO	07940101
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07940101

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