Metal selective polymer removal

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 5348619
SERIAL NO

07940101

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A metal selective polymer removal process is disclosed which prevents metal lift-off for use especially suited for ULSI fabrication.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
TEL FSI, INC.CHASKA, MN50
TEXAS INSTRUMENTS INCORPORATEDDALLAS, TX17615

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bohannon, Brynne K Sachse, TX 3 132
Syverson, Daniel J Chaska, MN 6 480

Cited Art Landscape

Patent Info (Count) # Cites Year
 
SHARP KABUSHIKI KAISHA (1)
* 5200361 Process for preparing a semiconductor device using hydrogen fluoride and nitrogen to remove deposits 13 1991
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (1)
* 5055383 Process for making masks with structures in the submicron range 18 1989
 
WACKER SILTRONIC GESELLSCHAFT FUR HALBLEITERMATERIALIEN AKTIENGESELLSCHAFT (1)
* 5181985 Process for the wet-chemical surface treatment of semiconductor wafers 94 1991
 
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (1)
* 5201992 Method for making tapered microminiature silicon structures 84 1991
 
MICRON TECHNOLOGY, INC. (1)
* 5089084 Hydrofluoric acid etcher and cascade rinser 50 1990
 
TEXAS INSTRUMENTS INCORPORATED (2)
* 4566935 Spatial light modulator and method 534 1984
* 4749440 Gaseous process and apparatus for removing films from substrates 350 1987
 
KABUSHIKI KAISHA TOSHIBA (1)
* 5030319 Method of oxide etching with condensed plasma reaction product 210 1989
 
NORTHROP GRUMMAN CORPORATION (1)
* 4711017 Formation of buried diffusion devices 33 1986
* Cited By Examiner

Patent Citation Ranking

Forward Cite Landscape

Patent Info (Count) # Cites Year
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (7)
* 5780363 Etching composition and use thereof 25 1997
* 5965465 Etching of silicon nitride 12 1997
* 6150282 Selective removal of etching residues 12 1997
* 6033996 Process for removing etching residues, etching mask and silicon nitride and/or silicon dioxide 25 1997
6200891 Removal of dielectric oxides 23 1998
* 6117796 Removal of silicon oxide 5 1998
* 6066267 Etching of silicon nitride 12 1999
 
FREESCALE SEMICONDUCTOR, INC. (1)
* 5693147 Method for cleaning a process chamber 27 1995
 
MICRON TECHNOLOGY, INC. (1)
* 5882535 Method for forming a hole in a semiconductor device 32 1997
 
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (2)
* 5755891 Method for post-etching of metal patterns 3 1997
* 5858879 Method for etching metal lines with enhanced profile control 65 1997
 
SILICON LIGHT MACHINES CORPORATION (47)
5841579 Flat diffraction grating light valve 186 1995
5808797 Method and apparatus for modulating a light beam 334 1996
5982553 Display device incorporating one-dimensional grating light-valve array 406 1997
6088102 Display apparatus including grating light-valve array and interferometric optical system 141 1997
6271808 Stereo head mounted display using a single display device 102 1998
6130770 Electron gun activated grating light valve 74 1998
6101036 Embossed diffraction grating alone and in combination with changeable image display 78 1998
6215579 Method and apparatus for modulating an incident light beam for forming a two-dimensional image 116 1998
6956878 Method and apparatus for reducing laser speckle using polarization averaging 36 2000
7177081 High contrast grating light valve type device 31 2001
6764875 Method of and apparatus for sealing an hermetic lid to a semiconductor die 35 2001
6865346 Fiber optic transceiver 6 2001
6747781 Method, apparatus, and diffuser for reducing laser speckle 69 2001
6829092 Blazed grating light valve 14 2001
6707591 Angled illumination for a single order light modulator based projection system 4 2001
6800238 Method for domain patterning in low coercive field ferroelectrics 1 2002
6782205 Method and apparatus for dynamic equalization in wavelength division multiplexing 72 2002
6991953 Microelectronic mechanical system and methods 13 2002
6767751 Integrated driver process flow 7 2002
6728023 Optical device arrays with optimized image resolution 30 2002
7054515 Diffractive light modulator-based dynamic equalizer with integrated spectral monitor 1 2002
6822797 Light modulator structure for producing high-contrast operation using zero-order light 6 2002
6872984 Method of sealing a hermetic lid to a semiconductor die at an angle 27 2002
6829258 Rapidly tunable external cavity laser 36 2002
6908201 Micro-support structures 6 2002
6813059 Reduced formation of asperities in contact micro-structures 90 2002
6714337 Method and device for modulating a light beam and having an improved gamma response 8 2002
7057795 Micro-structures with individually addressable ribbon pairs 4 2002
6801354 2-D diffraction grating for substantially eliminating polarization dependent losses 10 2002
6956995 Optical communication arrangement 10 2002
6712480 Controlled curvature of stressed micro-structures 7 2002
7049164 Microelectronic mechanical system and methods 61 2002
6928207 Apparatus for selectively blocking WDM channels 3 2002
7057819 High contrast tilting ribbon blazed grating 6 2002
6987600 Arbitrary phase profile for better equalization in dynamic gain equalizer 2 2002
6934070 Chirped optical MEM device 6 2002
6927891 Tilt-able grating plane for improved crosstalk in 1×N blaze switches 3 2002
7068372 MEMS interferometer-based reconfigurable optical add-and-drop multiplexor 6 2003
7286764 Reconfigurable modulator-based optical add-and-drop multiplexer 4 2003
6947613 Wavelength selective switch and equalizer 1 2003
6922272 Method and apparatus for leveling thermal stress variations in multi-layer MEMS devices 9 2003
7391973 Two-stage gain equalizer 2 2003
7027202 Silicon substrate as a light modulator sacrificial layer 55 2003
6922273 PDL mitigation structure for diffractive MEMS and gratings 2 2003
6829077 Diffractive light modulator with dynamically rotatable diffraction plane 4 2003
6806997 Patterned diffractive light modulator ribbon for PDL reduction 3 2003
7042611 Pre-deflected bias ribbons 0 2003
 
MASSACHUSETTS INSTITUTE OF TECHNOLOGY (2)
* 6107166 Vapor phase cleaning of alkali and alkaline earth metals 2 1997
6740247 HF vapor phase wafer cleaning and oxide etching 51 2000
 
UNITED MICROELECTRONICS CORP. (2)
* 5851302 Method for dry etching sidewall polymer 17 1997
* 5925577 Method for forming via contact hole in a semiconductor device 25 1997
 
SANDIA CORPORATION (1)
* 6930051 Method to fabricate multi-level silicon-based microstructures via use of an etching delay layer 3 2002
 
SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING CORPORATION (2)
* 8951715 Method of forming patterned film on a bottom and a top-surface of a deep trench 0 2013
* 2014/0141,615 METHOD OF FORMING PATTERNED FILM ON A BOTTOM AND A TOP-SURFACE OF A DEEP TRENCH 0 2013
 
APPLIED MATERIALS, INC. (6)
* 6010603 Patterned copper etch for micron and submicron features, using enhanced physical bombardment 24 1997
* 6008140 Copper etch using HCI and HBr chemistry 28 1997
6489247 Copper etch using HCl and HBR chemistry 6 1999
6488862 Etched patterned copper features free from etch process residue 11 1999
6534416 Control of patterned etching in semiconductor features 8 2000
6692903 Substrate cleaning apparatus and method 25 2000
 
TEXAS INSTRUMENTS INCORPORATED (3)
* 5650881 Support post architecture for micromechanical devices 276 1994
* 6447126 Support post architecture for micromechanical devices 340 1995
* 5631782 Support post architecture for micromechanical devices 83 1995
 
WINBOND ELECTRONICS CORP. (1)
* 6329293 Method for cleaning a polymer 1 1998
 
PROMOS TECHNOLOGIES INC. (1)
6399509 Defects reduction for a metal etcher 1 2000
* Cited By Examiner